FC-300
Hot Merchandise
Semi-Auto FOUP/FOSB/Cassette Cleaner
- Designed for 6/8" Cassette/Box, 12" FOUP/FOSB
- The cleaning chamber adopts high-quality PVC welding
- Clean with high pressure DI water + clean XCDA (N2)
- High-speed centrifugal dehydration + IR infrared lamp drying
Features
Support FOUP model:
- Semi12"FOUP Shinetsu 300EX
- Semi12"FOUP Entegris F300 Auto pod
- Semi12"FOSB KTL-3004A Rev2
- Semi8"Cassette Entegris PA192-80MN
- Semi8"Cassette PAK ePB-8/200-25-R-2
Application
This equipment can handle a large number of wafer boxes and clean the inside and outside of FOUP/FOSB, greatly improving the cleanliness of FOUP/FOSB
